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CVD / CVI coating systems

Type CVI

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Description

Thermally induced chemical vapor infiltration (CVI) is a CVD-related technology for infiltrating matrix material into porous or fibrous preforms to produce composite parts with improved mechanical properties, corrosion resistance, thermal shock resistance and low residual stresses.

Complex shapes can be produced in a variety of sizes and compositions. By switching between multiple gas orifices, the porous or fibrous preforms can be coated with multi-layer interfacial coatings before the actual deposition of the matrix itself begins.

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Functions

Coating under atmospheric pressure ""AP-CVD"" or under relative pressure ""LP-CVD""
High flexibility in process optimization and design
Extensive data evaluation
Prototype production, series production
Design: bottom loader
Temperature measurement using thermocouple and pyrometer

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Main specifications

Application temperatures up to 2200 °C
Multi-zone heating
rotating turntable
exhaust gas aftertreatment
Controlled separation and treatment of by-products
Gas treatment and gas phase separation for SiC, Si₃N₄, BN and AlN

SiC: CH₃SiCl₃ → SiC + 3HCl
Si₃N₄: 3SiCl₄ + 4NH₃ → Si₃N₄ + 12HCl
BN: BCl₃ + NH₃ → BN + 3HCl
AlN: AlCl₃ + NH₃ → AlN + 3HCl

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Options

PyC coating and/or infiltration applications
Automatic refilling station for MTS

HCl / H₂ detectors
Cooling water supply by chiller or heat exchanger units

CVI Standardtypes	Useful dimensions (Ø/h) [mm]	Useful volume [dm3]	max. load [kg]	max. Temperature [°C]	max. Heating power [kW]
FS W 500-CVI	1000 x 600	500	≤ 450	1600	300

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