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中文 CVD / CVI coating systems
Type CVI
CVD / CVI coating systems
Description
Thermally induced chemical vapor infiltration (CVI) is a CVD-related technology used to infiltrate matrix materials into porous or fibrous preforms in order to produce composite components with enhanced mechanical properties, corrosion resistance, thermal shock resistance, and low residual stress.
Complex shapes in a wide range of sizes and compositions can be produced. By switching between multiple gas inlets, the porous or fibrous preforms can be coated with multilayer interfacial layers before initiating the actual deposition of the matrix material.
Functions
- Coating under atmospheric pressure ""AP-CVD"" or under relative pressure ""LP-CVD""
- High flexibility in process optimization and design
- Extensive data evaluation
- Prototype production, series production
- Design: bottom loader
- Temperature measurement using thermocouple and pyrometer
Main specifications
- Application temperatures up to 2200 °C
- Multi-zone heating
- rotating turntable
- exhaust gas aftertreatment
- Controlled separation and treatment of by-products
- Gas treatment and gas phase separation for SiC, Si3N4, BN and AlN
- SiC: CH3SiCl3 → SiC + 3HCl
- Si3N4: 3SiCl4 + 4NH3 → Si3N4 + 12HCl
- BN: BCl3 + NH3 → BN + 3HCl
- AlN: AlCl3 + NH3 → AlN + 3HCl
Options
- PyC coating and/or infiltration applications
- Automatic refilling station for MTS
- HCl / H₂ sensors
- Cooling water supply
| CVI Standard types |
Usable dimensions (Ø/h) [mm] |
Usable volume [dm3] |
Max. load [kg] |
Max. temperature [°C] |
Max. heating power [kW] |
|---|---|---|---|---|---|
| FS W 500-CVI | 1000 x 600 | 500 | ≤ 450 | 1600 | 300 |
