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中文 CVD / CVI coating systems
Type CVI
Description
Thermally induced chemical vapor infiltration (CVI) is a CVD-related technology for infiltrating matrix material into porous or fibrous preforms to produce composite parts with improved mechanical properties, corrosion resistance, thermal shock resistance and low residual stresses.
Complex shapes can be produced in a variety of sizes and compositions. By switching between multiple gas orifices, the porous or fibrous preforms can be coated with multi-layer interfacial coatings before the actual deposition of the matrix itself begins.
Functions
- Coating under atmospheric pressure ""AP-CVD"" or under relative pressure ""LP-CVD""
- High flexibility in process optimization and design
- Extensive data evaluation
- Prototype production, series production
- Design: bottom loader
- Temperature measurement using thermocouple and pyrometer
Main specifications
- Application temperatures up to 2200 °C
- Multi-zone heating
- rotating turntable
- exhaust gas aftertreatment
- Controlled separation and treatment of by-products
- Gas treatment and gas phase separation for SiC, Si3N4, BN and AlN
- SiC: CH3SiCl3 → SiC + 3HCl
- Si3N4: 3SiCl4 + 4NH3 → Si3N4 + 12HCl
- BN: BCl3 + NH3 → BN + 3HCl
- AlN: AlCl3 + NH3 → AlN + 3HCl
Options
- PyC coating and/or infiltration applications
- Automatic refilling station for MTS
- HCl / H2 detectors
- Cooling water supply by chiller or heat exchanger units
| CVI Standardtypes |
Useful dimensions (Ø/h) [mm] | Useful volume [dm3] |
max. load [kg] | max. Temperature [°C] |
max. Heating power [kW] |
|---|---|---|---|---|---|
| FS W 500-CVI | 1000 x 600 | 500 | ≤ 450 | 1600 | 300 |
