CVD / CVI coating and infiltration systems
Type CVD 30
Functions:
- Useful dimensions (Ø/h) : 360 mm / 295 mm
- Useful volume : 30 dm³
- max. loading capacity : ≤ 25 kg
- Process temperature range : 900 - 1500 °C
- max. temperature : 1600°C
- Median heating rate (RT-1600°C) : ≤ 5 K/ min
- Temperature homogeneity in useful volume : ± 10 K
- Ultimate vacuum (cold, clean furnace) : ≤ 2x10-1 mbar (20 Pa)
- Leakage rate : ≤ 5 x 10-2 mbar l / s
- Partial pressure control range : 10 - 100 mbar
- max. available heating power : 45 KW
- Cooling water requirement (p_in: 4 bar) : 30 KW
- Space requirement (W/H/D) : 5 / 3 / 3 m
- Needed power supply : 3 x 380 V±5%, 50 Hz, 130 kVA
- control system : Siemens S7 / 1500 and WinCC
- Option: Burner Scrubber
- Option: Vaporizer
reserves the right to make changes