CVD / CVI coating and infiltration systems

Type CVD 175

Functions:

  • Useful dimensions   (Ø/h) :    530 mm / 800 mm 
  • Useful volume :   175 dm³
  • max. loading capacity :   ≤ 100 kg
  • Process temperature range :   900 - 1500 °C
  • max. temperature :    1600°C
  • Median heating rate  (RT-1600°C) :   ≤ 5 K/ min
  • Temperature homogeneity in useful volume :   ± 10 K
  • Ultimate vacuum (cold, clean furnace) :   ≤ 2x10-1 mbar (20 Pa)
  • Leakage rate :   ≤ 5 x 10-2 mbar l / s
  • Partial pressure control range :   10 - 100 mbar
  • max. available heating power :   150 KW
  • Cooling water requirement (p_in: 4 bar) :   100 KW
  • Space requirement (W/H/D) :   6 / 6,5 / 4,5 m
  • Needed power supply :   3 x 380 V±5%, 50 Hz, 250 kVA
  • control system :   Siemens S7 / 1500 and WinCC
  • Option: Burner Scrubber
  • Option: Vaporizer

 

reserves the right to make changes

CVD systeme: chemical vapor deposition
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CVD systeme: chemical vapor deposition

Typ: KCE®-FCT CVD 30-SiC

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